FLOW & PRODUCTS  工程別対応製品

Resist Spin Coat

hmds-150
hmds-150
spin-150
spin-150
spin-100
spin-100

slit-200
slit-200


Bake &Thickness

bake-150
bake-150
bake-200
bake-200
film-150
film-150


Exposure

contact-100
contact-100
contact-100_DA1000
contact-100_DA1000

contact-150
contact-150
contact-150_MA1200A
contact-150_MA1200A
impr-150
impr-150


P.E.B &Cool

bake-150
bake-150
bake-200
bake-200
cool-150
cool-150


Development

dev-150
dev-150


Etching

etch-150
etch-150
TP-50B
TP-50B


CMP & CLEANING

CMP-100
CMP-100
CMP-150
CMP-150
BSW-100
BSW-100